The acquisition of a confocal laser optical profilometer with high z resolution will allow the Microelectronics Technologies Laboratory (LTM) to fill a lack of optical metrology tools to enable rapid and resolved dimensional control on future 3D microstructures which are envisaged for the components of the future.The new equipment should therefore allow the 3D reconstruction of profiles with micrometric lateral dimensions and sub-micrometric and micrometric vertical dimensions, with high z resol
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